http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104849366-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-02 |
| filingDate | 2015-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104849366-B |
| titleOfInvention | Detecting system and detection method |
| abstract | The invention provides a kind of detecting system and detection method.The detecting system includes hydrogen feeding mechanism, inert gas feeding mechanism, vaporizer and mixing chamber, vaporizer has the injection port for being used for being passed through chlorosilane, the first entrance of mixing chamber is connected with the outlet of vaporizer, and the outlet of hydrogen feeding mechanism and the outlet of inert gas feeding mechanism are connected in parallel in the second entrance of mixing chamber；The detecting system also includes chlorosilane reduction apparatus, removing means, methane adsorption desorption device, gas chromatograph and the data output device for being sequentially connected in series setting, and the entrance of chlorosilane reduction apparatus and the outlet of mixing chamber, removing means are used to remove hydrogen chloride and unreacted chlorosilane.Carbon hydro-reduction in chlorine-containing silane is methane by chlorosilane reduction apparatus by the present invention, and then methane is sent into gas chromatograph and the carbon content in methane is measured, it is achieved thereby that the total carbon content in detection chlorine-containing silane. |
| priorityDate | 2015-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.