| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2203-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2312-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F299-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F120-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2014-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-104749876-B |
| titleOfInvention |
Copolymer formulations, methods of manufacture thereof, and products including the same |
| abstract |
Disclosed herein is a method comprising disposing a pad composition on a surface of a semiconductor substrate; wherein the mat composition comprises a random copolymer comprising a first acrylate unit and a second unit; wherein the copolymer does not comprise polystyrene or polyepoxide; crosslinking the random copolymer; disposing a brush-back composition on the substrate; such that the brush back fill composition and the pad composition alternate with each other; disposing a block copolymer that undergoes self-assembly on the brush backfill composition and the pad composition; and etching the block copolymer to create uniformly spaced channels in the semiconductor substrate. |
| priorityDate |
2013-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |