http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104746036-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06 |
| filingDate | 2013-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104746036-B |
| titleOfInvention | A kind of film encapsulation method |
| abstract | The present invention relates to a kind of film encapsulation method, comprise the following steps：Organic function layer is deposited by PECVD methods；Inorganic functional layer is deposited by pulse flow PECVD methods, the pulse flow PECVD methods are to input the presoma in PECVD methods by pulse input mode；Deposit the film of some organic function layers and inorganic functional layer alternating structure.Realize that speed is controllable, fast deposition better quality film. |
| priorityDate | 2013-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.