| abstract |
This invention is to improve performance of a semiconductor integrated circuit device. A semiconductor device has a peripheral circuit chip and a logic chip mounted over a wiring substrate. The wiring substrate and the peripheral circuit chip are electrically connected, and the peripheral circuit chip and the logic chip are electrically connected. The peripheral circuit chip includes a first peripheral circuit, a power supply controller, a temperature sensor and a first RAM. The logic chip includes a CPU, a second peripheral circuit and a second RAM. The first peripheral circuit and the first RAM are manufactured based on a first process rule. The CPU, the second peripheral circuit and the second RAM are manufactured based on a second process rule finer than the first process rule. |