http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104730372-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-00 |
| filingDate | 2014-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104730372-B |
| titleOfInvention | Fault Detection Based on RF Impedance Model |
| abstract | The present invention relates to fault detection based on RF impedance models. A method of detecting potential faults in a plasma system is described. The method includes accessing a model of one or more components of the plasma system. The method also includes receiving data related to providing RF power to the plasma chamber. RF power is provided using a configuration that includes one or more states. The method also includes using the data to generate model data at the model output. The method includes examining model data. Checking refers to checking one or more variables that characterize the performance of the plasma process of the plasma system. The method includes identifying failures of one or more variables. The method also includes determining that the fault has occurred for a predetermined period of time such that the fault is identified as an event. The method includes classifying the event. |
| priorityDate | 2013-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.