| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-48 |
| filingDate |
2007-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12b4ffc7a204d72acf45794272ea1c89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45b924182d17d8a7c7b211c3829068b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b458cb5aa3eb00641041a268a015718
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9ec0b055d14dd615324a182a5944f21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9da225554df0144657bbe981e528c192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b431ab69d363016d026186e15997539f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbfb3a35814adc84640d94f5248dbe05 |
| publicationDate |
2015-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-104710178-A |
| titleOfInvention |
Plasma-resistant corrosive ceramic plasma with controlled electrical resistivity |
| abstract |
Specialty ceramic materials which resist corrosion/erosion under semiconductor processing conditions which employ a corrosive/erosive plasma. The corrosive plasma may be a halogen-containing plasma. The specialty ceramic materials have been modified to provide a controlled electrical resistivity which suppresses plasma arcing potential. |
| priorityDate |
2007-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |