| abstract |
The invention discloses an ultrasonic sensor which comprises a first electrode, a first piezoelectric layer, a substrate, a second electrode, a second piezoelectric layer and a third electrode, wherein the first electrode and the first piezoelectric layer are stacked on one surface of the substrate; the second electrode, the second piezoelectric layer and the third electrode are stacked on the other surface of the substrate; the substrate is made of a chemical enhanced glass base material. |