http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104617178-B
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-548 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-095 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-076 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-032 |
filingDate | 2015-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2017-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2017-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-104617178-B |
titleOfInvention | Ultraviolet detector and preparation method thereof |
abstract | The invention discloses an ultraviolet detector, a preparation method of the ultraviolet detector and an amorphous oxide film serving as an optical activation layer of the ultraviolet detector. The ultraviolet detector comprises a substrate, the optical activation layer and a pair of electrodes, wherein the amorphous oxide film serves as the optical activation layer, the chemical formula of the amorphous oxide film is Zn4AlxSn7O<1.5x+18>, and the x is larger than or equal to zero and smaller than or equal to one. The preparation method of the ultraviolet detector comprises the steps of preparation of the substrate, forming of the optical activation layer and forming of the metal electrodes, wherein the step of forming of the optical activation layer comprises the step that the amorphous oxide film with the chemical formula of Zn4AlxSn7O<1.5x+18> is formed through a low-temperature chemical reaction method. According to the prepared ultraviolet detector, the dark current ranges from 10<-9>A to 10<-6>A, the light current ranges from 10<-8>A to 10<-5>A, and the response sensitivity ranges from 10 to 50. The preparation method of the ultraviolet detector is easy to operate and low in cost, and the prepared ultraviolet detector has the advantages of being high in detection sensitivity and having important application value in the fields of the military and civil application. |
priorityDate | 2015-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.