http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104599940-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00206 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate | 2014-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104599940-B |
| titleOfInvention | It is a kind of that the method for preparing secondary micro- curved-surface structure is superimposed with bitmap |
| abstract | The present invention is the method that a kind of superposition of bitmap prepares secondary micro- curved-surface structure, including step is as follows：Step S1：The surface for treating processed sample pre-processes；Step S2：Sample to be processed is adhered on the sample carrier for focusing on electron/ion beams double-beam system；Step S3：The sample carrier that sample to be processed will be glued is fixed on the specimen holder for focusing on electron/ion beams double-beam system, and sample chamber is vacuumized；Sample surfaces to be processed are needed process the position adjustment of secondary micro- curved-surface structure to the focusing electron beam position coaxial with ion beam under the electron beam for focusing on electron/ion beams double-beam system；Step S4：Under suitable focused ion beam system imaging multiplication factor, ion beam accelerating voltage and ion current size are selected, need to carry out the position of secondary micro- curved-surface structure processing on sample to be processed, according to the setting secondary micro- curved-surface structure of etched features file lithography. |
| priorityDate | 2014-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166767 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450651619 |
Total number of triples: 15.