http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104545794-B
Outgoing Links
Predicate | Object |
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classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B3-16 |
filingDate | 2015-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2017-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2017-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-104545794-B |
titleOfInvention | Wireless passive non-invasive MEMS intraocular pressure sensor and manufacturing method thereof |
abstract | The invention discloses a non-invasive wireless passive intraocular pressure sensor and a manufacturing method thereof. The intraocular pressure sensor comprises a flexible substrate layer, a first electrode layer, an intermediate layer, a second electrode layer and a flexible substrate layer, wherein a dielectric layer of a central capacitor is formed by a part of the intermediate layer, and a polar plate of the central capacitor is formed by corresponding parts of the first electrode layer and the second electrode layer; and the flexible substrate layers are prepared by using ParyleneC thin films, and the intermediate layer is prepared by using a PDMS material. The non-invasive wireless passive intraocular pressure sensor disclosed by the invention is simple and feasible in the whole set of process; the series connection between the capacitor and an inductor can be achieved by using extra edge capacitance, and a simple structure can be achieved; and a sensor electrode is simple to manufacture, the prepared electrode is low in resistivity, the acquisition of relatively high quality factors can be facilitated, and the signal-to-noise ratio of detection signals can be improved. |
priorityDate | 2015-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.