| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-64 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-34 |
| filingDate |
2006-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35a83aafe559da9a24c1a256a3c3478a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01d0d4f6c01bc275d9c7ef45f84d1133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4047129a4704ca0579de91091ee658a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f9e20c6f902fd075512b10c6e95014f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55d997c9af108c1b2f376acf94b56229 |
| publicationDate |
2015-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-104526536-A |
| titleOfInvention |
Apparatus and methods for spectrum based monitoring of chemical mechanical polishing |
| abstract |
The invention discloses an apparatus and methods of spectrum base monitoring for chemical mechanical polishing, comprising detecting a spectrum base terminal, adjusting a spectrum base polishing rate and washing an upper surface of an optical head or a gasket with a window. The spectrum base terminal detection selects a reference spectrum for a specific spectrum base terminal determining logic according to an experience rule, and accordingly a terminal is determined by using the specific spectrum base terminal determining logic, i.e., a target thickness is obtained. A polishing terminal can be determined by utilizing a difference picture or a series of indicator values. A washing system generates laminar flow on the surface of an optical head. A vacuum spraying hole and a vacuum source are configured to make airflow be in a laminar flow state. The window comprises a soft plastic part and a crystallized or glass part. The spectrum base polishing rate adjustment comprises obtaining spectrum in different areas on basic materials. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112025547-A |
| priorityDate |
2005-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |