http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104505333-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2013-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104505333-B |
| titleOfInvention | Deposit Removing Method And Gas Processing Apparatus |
| abstract | A deposit removing method includes an exposing process of heating and exposing a substrate to oxygen plasma; and a cycle process in which the substrate is exposed to an atmosphere of a mixture gas of a hydrogen fluoride gas and an alcohol gas, and a first period during which a total pressure of the mixture gas or a partial pressure of the alcohol gas is set to be a first total pressure or a first partial pressure and a second period during which the total pressure or the partial pressure is set to be a second total pressure lower than the first total pressure or a second partial pressure lower than the first partial pressure are repeated multiple cycles. A supply amount of the mixture gas from a first region including a central portion of the substrate is larger than that from a second region outside the first region. |
| priorityDate | 2012-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.