| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823871
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-16 |
| filingDate |
2013-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2017-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-104395502-B |
| titleOfInvention |
Etch combination |
| abstract |
This disclosure relates to contain about 60% to about 95% at least one sulfonic acid；The chloride anion of about 0.005% to about 0.04%；The bromide anions of about 0.03% to about 0.27%；The nitrate or nitrosyl radical ion of about 0.1% to about 20%；The etch combination of the water of about 3% to about 37%. |
| priorityDate |
2012-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |