http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104395236-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2033-0095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-80 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02595 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-03 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-03 |
| filingDate | 2013-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104395236-B |
| titleOfInvention | The manufacture method of high-purity polycrystalline silicon |
| abstract | The present invention provides through use the low unstrpped gas of concentration of carbon-containing impurities to realize the technology of the further high purity of polysilicon.First, preparation trichlorosilane, as sample (S101), utilizes GC/MS SIM method to analyze its carbon-containing impurities amount (S102).Whether qualified (S103) is judged, it is determined that for (S103: yes) in the case of certified products, as the production of raw material for use (104) of high-purity polycrystalline silicon based on CVD based on analysis result.On the other hand, it is determined that for (S103: no) in the case of defective work, then not as the production of raw material for use of polysilicon.If impurity analysis based on GC/MS SIM method use be connected in series non-polar column and middle polarity post and the post that obtains as detached dowel, then can carry out chlorosilane simultaneously and separate with hydro carbons and chlorosilane separates with methyl-monosilane class. |
| priorityDate | 2012-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.