http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104387523-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 |
| filingDate | 2014-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104387523-B |
| titleOfInvention | Film-forming resin containing sesquiterpene lactoness and its positivity dry method exposure 193nm photoresists |
| abstract | The present invention discloses a kind of film-forming resin containing sesquiterpene lactoness and its positivity dry method exposure 193nm photoresists, its film-forming resin is carried out copolyreaction in a solvent and is prepared from by a kind of comonomer containing sesquiterpene lactoness is at least included under conditions of radical initiator presence；It is characterized in that：The molecular weight of the film-forming resin is 4,000～1,000,000, and molecular weight distribution is 1.4～2.4；The comonomer is mainly the compound of following masses percentage composition：Component units 10%～60% containing natural product sesquiterpene lactoness, monomer containing acid-labile group 5%～40%, other performance adjust constituent monomers 1% ~ 20%.Film-forming resin containing sesquiterpene lactoness disclosed by the invention and its positivity dry method exposure 193nm photoresists have good resolution, the adhesion property between photoresist and silicon chip can also be increased, improve the heat resistance of photoresist, improve its etch resistance energy, and be avoided that to form gas overflowing and affect litho pattern and damage the situation generation of expensive exposure machine camera lens. |
| priorityDate | 2014-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 107.