http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104380195-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2013-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104380195-B |
| titleOfInvention | Pattern forming method and actinic ray-sensitive or radiation-sensitive resin composition for this method |
| abstract | The present invention pattern forming method include：(i) film for including actinic ray-sensitive or radiation-sensitive resin composition is formed, the actinic ray-sensitive or radiation-sensitive resin composition contains by the compound (A) of logical formula (I) expression as shown below；The resin (P) to the solubility of the developer solution comprising organic solvent can be reduced by the effect of acid；And the compound (B) of acid can be generated by the irradiation of actinic ray or radioactive ray；(ii) actinic ray or radioactive ray is used to irradiate the film；(iii) will be developed with the film of the actinic ray or radioactive ray irradiation using the developer solution comprising organic solvent.R N ‑A ‑ X + (I) |
| priorityDate | 2012-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 261.