| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76808
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528 |
| filingDate |
2014-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-104377189-B |
| titleOfInvention |
Integrated circuit and its manufacture method with side wall layer and super thick metal level |
| abstract |
A kind of integrated circuit, including substrate, the metal level above substrate and the first dielectric layer positioned at metal layer.First dielectric layer includes through hole.Side wall layer including silicon compound is located in through hole.Second dielectric layer is located above side wall layer and super thick metal (UTM) layer is located in through hole.The present invention relates to the integrated circuit with side wall layer and super thick metal level and its manufacture method. |
| priorityDate |
2013-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |