| abstract |
The present invention provides a kind of aberrations in property that can suppress each flow sensor and realizes the technology of performance raising.For example, in the arbitrary section parallel with the direction of advance of the gas in the upper flowing of the flow testing division (FDU) for exposing being formed on semiconductor chip (CHP1), by making the semiconductor chip (CHP1) not with configuration near the central portion overlap configure semiconductor chip (CHP1) exterior lateral area protrudent pin (EJPN) from lower mold (BM) projection, make obturator from lower mold (BM) demoulding.Thus, according to present embodiment one, with by protrudent pin (EJPN) configuration the region overlapped with semiconductor chip (CHP1) carry out obturator from the occasion of the demoulding of lower mold (BM) compared with, the deformation that is applied to when can reduce the demoulding on obturator. |