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filingDate 2014-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2017-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-104362176-B
titleOfInvention Self-aligned double-gate small-gap semiconductor transistor with high on-off ratio and manufacturing method thereof
abstract The invention discloses a self-aligned double-gate small-gap semiconductor transistor with high on-off ratio and a manufacturing method thereof. According to the transistor, drain bias voltage is fed back to an auxiliary gate, a clamped square barrier is formed around a drain, and reverse tunneling of drain minority carriers can be well inhibited during running under large bias voltage; thus, the on-off ratio can be increased at the premise of keeping high performance of a non-doped small-gap semiconductor top gate device, and bipolarity is evidently inhibited. Meanwhile, the use of a two-step self-aligned process leads to reduction in device size, and the transistor is applicable to large-scale integrations.
priorityDate 2014-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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