http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104350380-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0633 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-54 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate | 2012-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104350380-B |
| titleOfInvention | Measurement apparatus and film formation device |
| abstract | A kind of device that can be realized the measurement of more high speed and be obtained in that the measurement result of higher precision is provided, is used as the measurement apparatus that at least one of the optical characteristic value to film and blooming value value is measured.The measurement apparatus (101) measured including the value of at least one party in optical characteristic value and blooming value for being formed at the film of monitoring substrate (Sm) are possessed：Optical signal produces mechanism (10), and multiple LED units (11a～11f) are modulated into setpoint frequency mutually different for each light source cell using the monochromatic light generated by optical light filter by which, and send multiple optical signals；Irradiation means (20), which is multiplexed to the plurality of optical signal and is generated multiplexed signals, and is irradiated multiplexed signals to monitoring substrate (Sm) by optical fiber；Testing agency (30), its pass through fiber laser arrays by monitoring multiplexed signals that substrate (Sm) reflects and export electric signal；Signal separator mechanism (50), the electric signal exported to testing agency (30) by which implement the filtering process of bandpass filter, from the electric signal separate the twocomponent signal of each setpoint frequency；And mechanism (80) is calculated, its twocomponent signal based on each setpoint frequency that separates calculates the optical characteristic value represented by twocomponent signal according to each setpoint frequency, and the measurement apparatus measure multiple optical characteristic values simultaneously. |
| priorityDate | 2012-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3033 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419583338 |
Total number of triples: 19.