http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104326474-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-107 |
| filingDate | 2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104326474-B |
| titleOfInvention | The method of trichlorosilane prepared by plasma heating fluidized-bed |
| abstract | The present invention relates to a kind of method that trichlorosilane prepared by plasma heating fluidized-bed, comprise the following steps: add silicon grain to fluidized-bed reactor; In fluidized-bed reactor, pass into hydrogen set up a silicon grain fluidized-bed; Preheating silicon grain fluidized-bed; In plasma heat source body, pass into hydrogen, its plasma is changed into high temperature plasma gas, pass into the preheating together of silicon grain fluidized-bed; When silicon grain temperature reaches 200 DEG C ~ 1300 DEG C, stop preheating; Liquid silicon tetrachloride is vaporized; By the liquid silicon tetrachloride mixing after hydrogen make-up and vaporization; Hydrogen plasma, hydrogen make-up and silicon tetrachloride mixed gas are entered in fluidized-bed reactor, reacts with silicon grain and produce trichlorosilane gas, form tail gas with the silicon tetrachloride of non-complete reaction together with mixed gas of hydrogen etc.; Tail gas is taken out, is separated, prepares trichlorosilane.The present invention improves the thermograde in fluidized-bed reactor, makes to obtain thermal field in fluidized-bed reactor even, provides hydrogen plasma, significantly improve converting silicon tetrachloride rate, reduce energy consumption. |
| priorityDate | 2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.