Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-839 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-809 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-89 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-888 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-152 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31931 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-811 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-788 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31504 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C43-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
filingDate |
2013-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2018-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2018-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-104321700-B |
titleOfInvention |
The domain orientation in Block Copolymer Thin Film is controlled using chemical vapor deposition films |
abstract |
The present invention uses vacuum-deposited material film, forms the not same area with following Block Copolymer Thin Film without the interface preferentially to interact.No preferential interface prevents from forming wettable layer and influences the domain orientation in block copolymer.The purpose of the polymer of deposition is that the nano structure that may act as Lithographic pattern is generated in Block Copolymer Thin Film. |
priorityDate |
2012-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |