http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104316856-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2014-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104316856-B |
| titleOfInvention | Back side detection type photon radiation microscopie unit and method of testing |
| abstract | The present invention provides a kind of back side detection type photon radiation microscopie unit and its method of testing, and described device includes：Probe base, its upper surface is used for supporting probe seat, and one end of the probe base is connected with one end of feeler arm, and the other end of the feeler arm is connected with one end of probe；Sample stage, is suspended in the probe base top, and the sample stage is used to place semiconductor chip towards the surface of the probe base side, and the metal interconnecting layer of the semiconductor chip is in contact with the needle point of probe；Some optical lenses, are arranged at intervals at the lower section of sample stage and probe station, for optical focus, the optical lens and the sample stage, between probe base, feeler arm and probe have trouble free service distance；Multiple detectors, positioned at optical lens lower section, for defect location and analysis.The present invention provide back side detection type photon radiation microscopie unit and and its method of testing, can be analyzed from semiconductor chip front. |
| priorityDate | 2014-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 13.