http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104285284-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31055 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate | 2013-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104285284-B |
| titleOfInvention | Composition for polishing and Ginding process and the manufacture method of substrate using it |
| abstract | The composition for polishing of the present invention contains water-soluble polymer and abrasive particle.Water-soluble polymer is the compound of the anionic property with less than 3 acid dissociation constant pKa.As the specific example of such compound, it can include：Polyvinylsulfonic acid, polystyrolsulfon acid, polyallyl sulfonic acid, polyacrylic acid ethylsulfonic acid, polyacrylic acid butyl sulfonic acid, poly- (methyl propane sulfonic acid of 2 acrylamide 2), polyisoprene sulfonic acid.Abrasive particle is in pH3.5 negative Zeta potentials shown below.As the specific example of such abrasive particle, cataloid can be included. |
| priorityDate | 2012-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.