http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104254046-B

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filingDate 2014-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2018-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-104254046-B
titleOfInvention With in vibrating diaphragm and the MEMS microphone to the low-pressure area between electrode
abstract A kind of MEMS microphone, including the first membrane parts, to electrode member and in the first membrane parts and to the low-pressure area between electrode member.Low-pressure area has the pressure smaller than environmental stress.
priorityDate 2013-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Total number of triples: 26.