http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104250258-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02592 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-21 |
| filingDate | 2014-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104250258-B |
| titleOfInvention | Azapolysilane precursor and method of depositing thin films comprising same |
| abstract | Precursors and methods for forming silicon-containing films are described herein. In one aspect, there is provided an azapolysilane precursor comprising at least two Si-N bonds, at least one Si-Si bond, and at least two SiH groups, represented by the following formulas IA, IB and IC: Wherein R 1 and R 2 are independently selected from linear or branched C 1 -C 10 alkyl, linear or branched C 3 -C 10 alkenyl, linear or branched C 3 -C 10 alkynyl, C 3 ‑C 10 cycloalkyl, C 3 ‑C 10 heterocycloalkyl, C 5 ‑C 10 aryl, C 3 ‑C 10 heteroaryl, C 2 ‑C 10 dialkylamino and C 3 ‑C 10 Cycloalkylamino; R 3 and R 4 are independently selected from hydrogen, straight or branched C 1 ‑C 10 alkyl, straight or branched C 2 ‑C 10 alkenyl, straight or branched C 2 ‑ C 10 alkynyl, C 3 ‑C 10 cycloalkyl, C 3 ‑C 10 heterocycloalkyl, C 5 ‑C 10 aryl, C 3 ‑C 10 heteroaryl, C 2 ‑C 10 dialkylamino , and C 3 -C 10 cycloalkylamino; wherein R 1 in formula IA cannot be methyl, R 1 and R 2 in formula IB cannot be isopropyl, tert-butyl and benzyl at the same time and R 3 and R4 cannot be methyl and phenyl at the same time . |
| priorityDate | 2013-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.