http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104241246-B
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-335 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-525 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-772 |
filingDate | 2013-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2018-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2018-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-104241246-B |
titleOfInvention | Electric fuse structure and forming method thereof, semiconductor devices and forming method thereof |
abstract | The invention provides electric fuse structure and forming method thereof, semiconductor devices and forming method thereof.Wherein, in the forming method of electric fuse structure, nano wire is first formed on a semiconductor substrate, the substrate of etched portions thickness, makes the nano wire be raised in semiconductor substrate surface, then the both ends Doped ions in the nano wire, to form electric fuse structure afterwards.Above-mentioned technical proposal method is simple, and the electric fuse structure of formation is novel, realizes the diversity for the electric fuse structure to be formed. |
priorityDate | 2013-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.