http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104185778-B
Outgoing Links
Predicate | Object |
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classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J1-0459 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0896 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0821 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-59 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
filingDate | 2013-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2018-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2018-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-104185778-B |
titleOfInvention | The laser noise transmitted in temperature measuring is eliminated |
abstract | Disclose for measure substrate temperature apparatus and method.Described device includes:Indicate the source of the radiation of temperature;The detector of radiation about instruction temperature;And decorrelator, the decorrelator are set in the light path between the source of the radiation of the instruction temperature and the detector of the radiation about instruction temperature.The decorrelator can be broad band amplifier and/or mode scrambler.Broad band amplifier can be the combination of wideband laser, Bragg grating, fiber bragg grating, raman amplifier, Brillouin amplifier or these devices.The decorrelator is chosen so as to send out radiation, described to be radiated at least partially through just monitored board transport.If the decorrelator is gain driving device, the source is matched with the decorrelator, so that the emission spectrum in the source is in the gain bandwidth of the decorrelator. |
priorityDate | 2012-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.