http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104183535-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02502 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02667 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02592 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02645 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate | 2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104183535-B |
| titleOfInvention | Fill the method and processing unit of raceway groove |
| abstract | The present invention provides a kind of method and processing unit for filling raceway groove.A kind of method for filling raceway groove, it is the method being filled to forming the raceway groove on the dielectric film of handled object, and it includes following process：The 1st amorphous silicon film containing impurity is formed along the wall for marking off raceway groove；The 2nd amorphous silicon film is formed on the 1st amorphous silicon film；Handled object is annealed after the 2nd amorphous silicon film is formed. |
| priorityDate | 2013-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.