http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104152297-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3218 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-265 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08 |
| filingDate | 2011-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104152297-B |
| titleOfInvention | Cleaning combination, the manufacturing method of semiconductor device and cleaning method |
| abstract | The present invention provides the manufacturing method and cleaning method of a kind of cleaning combination that the removability of the plasma etching residue on the corrosion of metal and semiconductor substrate of semiconductor substrate and/or ash residue can be inhibited excellent and the semiconductor device using the cleaning combination.The manufacturing method and cleaning method of a kind of cleaning combination and the semiconductor device using the cleaning combination, it is characterized in that, the composition is the cleaning combination for removing the plasma etching residue being formed on semiconductor substrate and/or ash residue, it includes (ingredient a) water, (ingredient b) amine compounds, (ingredient c) azanol and/or its salt, (ingredient d) quaternary ammonium compound, (ingredient e) organic acid and (ingredient f) water-miscible organic solvent, and pH is 6~9. |
| priorityDate | 2010-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 177.