http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104067374-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-8593 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-303 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4558 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4488 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45574 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2012-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104067374-B |
| titleOfInvention | Multiple complementary gas distribution assemblies |
| abstract | The example devices with multiple gas distribution assemblies according to one embodiment are described herein.In one embodiment, the equipment includes two or more gas distribution assemblies.Each gas distribution assembly has hole, and at least one process gas is introduced to processing chamber housing by the hole.Two or more gas distribution assemblies are designed to be distributed with complementary feature radial direction layer-growth rate. |
| priorityDate | 2011-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.