http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104037282-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-0075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-0066 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-02 |
| filingDate | 2014-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104037282-B |
| titleOfInvention | Growth AlGaN thin film on a si substrate and its preparation method and application |
| abstract | The invention discloses growth AlGaN thin film on a si substrate, it includes Si substrate and epitaxially grown AlGaN thin film on a si substrate；The crystal orientation of described Si substrate is 0.5 1 ° of inclined 100 direction in 111 faces；Through using pulse laser deposition process growth AlGaN thin film, using metal organic chemical vapor deposition technique growth Al atomic layer, Al atomic layer carried out with the steps such as the selection of nitrogen treatment, substrate and its crystal orientation be prepared from.Described AlGaN thin film is applied in photodetector or LED component.The present invention solves to improve quality, purity and the interface performance of AlGaN thin film while the crack problem of GaN film on Si substrate, and reduces process costs. |
| priorityDate | 2014-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.