http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104025299-A

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publicationDate 2014-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-104025299-A
titleOfInvention Self-aligned gate structure for field effect transistor
abstract A field effect transistor has a substrate with an epitaxial layer, base regions extending from a top of the epitaxial layer into the epitaxial layer, an insulation region having side walls and extending between two base regions on top of the substrate; and a polysilicon gate structure covering the insulation region including the side walls, wherein effective gates are formed by a portion of the polysilicon covering side walls above the base region.
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Total number of triples: 23.