Predicate |
Object |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C39-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-2612 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C39-21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
filingDate |
2012-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2018-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2018-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-104024940-B |
titleOfInvention |
Monomer for hard mask compositions, the hard mask compositions comprising the monomer and the method that pattern is formed using the hard mask compositions |
abstract |
The present invention relates to a kind of monomer for hard mask compositions represented by formula 1, the hard mask compositions comprising the monomer and the method for forming pattern using the hard mask compositions. |
priorityDate |
2011-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |