http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103969565-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2886 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2014-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103969565-B |
| titleOfInvention | Quasiconductor evaluating apparatus and quasiconductor evaluation methodology |
| abstract | It is an object of the invention to provide a kind of quasiconductor evaluating apparatus and quasiconductor evaluation methodology, its low cost, and do not increase the time that evaluation operation is spent, it is possible to the generation of the shelf depreciation on suppression determinand simply.Quasiconductor evaluating apparatus (1) has: chuck table (3), and the semiconductor device (5) as determinand is kept by it；Contact probe (10), it is for contacting with the semiconductor device (5) being maintained in chuck table (3) and evaluate the electrical characteristic of semiconductor device (5)；And fluid blowing portion (7), it blows out fluid to semiconductor device (5). |
| priorityDate | 2013-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.