http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103958406-B
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-035 |
filingDate | 2012-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2016-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2016-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-103958406-B |
titleOfInvention | The manufacture method of polysilicon and polysilicon manufacture reacting furnace |
abstract | In the present invention, silicon is separated out on silicon heart yearn and obtain in the manufacture method of polysilicon of polycrystalline silicon rod, in the initial stage (leading portion operation) of evolution reaction, making the concentration of the unstrpped gas of supplying with by unstrpped gas being supplied in a large number in reacting furnace in the situation that not improving reaction speed is high concentration, improve thus reaction speed, the generation probability of puffed rice is suppressed at reduced levels by the effect that in the back segment operation after this leading portion operation, unstrpped gas is blown at a high speed the high speed forced convertion producing in reacting furnace by utilization. Thus, even in the reaction system of high-pressure trend, high load capacity, high speed, also can in the situation that not reducing production efficiency, manufacture the few and highly purified polycrystalline silicon rod of puffed rice. |
priorityDate | 2011-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.