http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103954636-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26 |
| filingDate | 2014-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103954636-B |
| titleOfInvention | A kind of transmission electron microscope film window of the original position electroluminescent phase transition process of High Resolution Observations phase-change material |
| abstract | The transmission electron microscope film window of a kind of electroluminescent phase transition process of High Resolution Observations phase-change material, comprises the following steps: processed the shape of electrode on sheet metal on mask plate by the method for cut or metal etch；Mask plate is covered at SiN x On film window, coater is utilized to plate metal electrode；Use at the electrode two ends of gained FIB to carry out electron beam deposition, prepare Small Distance Pt electrode；Utilize focused ion bundle, to the SiN between electrode x Thin film carries out the example platform of cutting processing bridge-like structure to the thin film between Pt electrode；It is being ready for the SiN of electrode x On film window, magnetron sputtering is used to plate film sample；It is connected with electrode carries out Experiments of Electricity in situ with conducting resinl transmission electron microscope is energized specimen holder.The present invention solves phase-change material can not carry out the problem of home position observation phase transition process in the devices, and avoids sample damage prepared by conventional FIB, reduces the preparation difficulty of sample. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110797457-A |
| priorityDate | 2014-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.