http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103952670-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 |
| filingDate | 2014-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103952670-B |
| titleOfInvention | Laser film quantification research method based on artificial defects |
| abstract | The present invention relates to a laser film research method, and belongs to the technical field of film optics. The method comprises: adopting polishing powder with different scales to prepare artificial scratches so as to determine process parameters of cold processing and hydrofluoric acid etching on a fused silica substrate; adopting micron-scale mono-dispersed beads to determine process parameters of ultrasonic wave cleaning and vacuum ion beam cleaning on the fused silica substrate; adopting absorbent nano-scale defects to determine process parameters of production of a film on the fused silica substrate; and adopting micron-scale mono-dispersed beads to determine defect post-treatment process parameters. According to the present invention, experiment results show that: with the method, the scales of different defects can be effectively controlled from the whole process of the laser film preparation, the quantitative process parameters can be determined according to requirements of different damage thresholds, the existing laser film preparation process can be effectively simplified, and the method can be compatible with the existing substrate processing, cleaning and preparation process. The method has advantages of good process repeatability, strong controllability, significant effect and the like, and can be completely applied in the field of the future high-power laser film. |
| priorityDate | 2014-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.