| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68 |
| filingDate |
2014-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2017-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-103941538-B |
| titleOfInvention |
Hardmask surface treatment |
| abstract |
The present invention provides a process for treating a surface of an oxymetal hardmask layer comprising inorganic domains having (-M-O-) n linkages, where M is a Group 3 to Group 14 metal and n＞1 comprising: contacting a surface of the hardmask with a surface treating composition to coat the hardmask surface, wherein the surface treating composition comprises an organic solvent and a surface treating agent comprising a surface treating moiety. |
| priorityDate |
2013-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |