http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103923571-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-04 |
| filingDate | 2014-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103923571-B |
| titleOfInvention | Polishing fluid and its preparation method and application |
| abstract | The invention discloses a kind of polishing fluid and its preparation method and application, wherein, described polishing fluid includes: caustic, viscosity modifier, corrosion inhibiter, brightener, deionized water；Described caustic includes: sulphuric acid and phosphoric acid；Described viscosity modifier is selected from one or more in material: Polyethylene Glycol, gelatin, polyhydric alcohol, glycerol, dextrin；Described corrosion inhibiter is selected from one or more in material: if fourth, thiourea, diamyl amine, toluene thiourea, ethylenediaminetetraacetic acid；Described brightener is selected from one or more in material: salicylic acid, sulfonic acid, sodium benzoate, Benzodiazepines, fluorine-containing quaternary ammonium salt.Not containing heavy metal component in the polishing fluid of the present invention, subsequent treatment is easy；Its polishing stable is better, and polishing fluid all can obtain good polishing effect in wider concentration change scope.Additionally, the preparation method process conditions of the polishing fluid of the present invention are loose, in very wide current density range, all can obtain good polishing effect. |
| priorityDate | 2014-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.