http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103887361-B

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classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-022408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-103
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-103
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0352
filingDate 2014-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2015-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-103887361-B
titleOfInvention There is the TiO of precious metal doping 2/ TiO 2homostyructure ultraviolet detector and preparation method thereof
abstract There is the TiO of precious metal dopingn 2 / TiOn 2 homostyructure ultraviolet detector and preparation method, belong to semiconductor photoelectric device technical field.Detector is successively by the TiO of quartz substrate, precious metal dopingn 2 thin layer, pure TiOn 2 thin layer, metal interdigital electrode form.It is characterized in that: detector has the TiO of precious metal dopingn 2 thin layer and pure TiOn 2 the homostyructure of thin layer composition.On the one hand by the doping of noble metal, basis material has lower Fermi level, reduces the barrier height that metal electrode contacts with basis material; On the other hand, the TiO of precious metal dopingn 2 thin layer and TiOn 2 the internal electric field direction that the internal electric field direction of the homostyructure that layer is formed contacts with device itself gold half is contrary, also reduces barrier height equally.The final doping vario-property from material and device architecture two aspect effectively improve the response characteristics to light of ultraviolet detector.
priorityDate 2014-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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