http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103882378-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 |
| filingDate | 2014-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103882378-B |
| titleOfInvention | A kind of preparation method of three boracic acid oxygen calcium yttrium crystal (YCOB) high laser damage threshold anti-reflection films |
| abstract | The invention discloses a kind of preparation method of nonlinear crystal three boracic acid oxygen calcium yttrium plane of crystal high laser damage threshold anti-reflection film.The micromechanism of damage of and anti-reflection film strong for YCOB crystalline anisotropy, the step of the method comprises the hf etching of YCOB substrate, the cold working of YCOB substrate, the ion beam etching of YCOB substrate, the ultrasonic cleaning of YCOB substrate, the vacuum ionic Shu Qingxi of YCOB substrate and YCOB substrate upper film and is coated with.The YCOB anti-reflection film optical characteristics prepared by the present invention is excellent, damage threshold is high, environmental stability good, can process, cleans and thin film preparation process compatibility with existing substrate.Have good process repeatability, controllability strong, be easy to the advantages such as popularization, in the Laser Films field in future, there is wide application prospect. |
| priorityDate | 2014-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.