http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103881586-B
Outgoing Links
Predicate | Object |
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classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
filingDate | 2014-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-103881586-B |
titleOfInvention | The preparation method of sapphire polishing liquid |
abstract | The invention discloses a kind of preparation method of sapphire polishing liquid, it is characterized in that said method comprising the steps of: (1) is with the α-Al of average grain diameter within the scope of 100 ~ 300nmn 2 on 3 nanocrystal is dispersed in aluminum saline solution as precursor solution as crystal seed; (2) precursor liquid is made containing α-Al by drying process with atomizingn 2 on 3 the spherical powder of nanocrystal crystal seed is as presoma; (3) presoma is controlled to sinter under the condition of 900 ~ 1200 DEG C in temperature range, obtain α-Aln 2 on 3 powder; (4) by α-Aln 2 on 3 powder is distributed in water, and the size of adjusted to ph and second particle, namely obtain sapphire polishing liquid.The method gained sapphire polishing liquid particle mean size is little, narrow particle size distribution, and water dispersible is good, and process parameters range is wide and adjustable, substantially increases efficiency and the precision of sapphire polishing. |
priorityDate | 2014-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 58.