| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d0a3d10ed9477633fd2c07c6da61dc49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_151ea1739c5ecf9c672c41e76e959f45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2d846ebce065fcdbac8bdebf628321b6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7393
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66666
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7827 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-331
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-739 |
| filingDate |
2012-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cdb838e277aa91ede5c23c61a1245cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0dd00f02e70f10792722ba9e2e6a73b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82505329bb7866c725ab33fbf4ac3666
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0939d0951ecc9586afb4cb8b7a6871d4 |
| publicationDate |
2014-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-103854999-A |
| titleOfInvention |
Super junction manufacturing method |
| abstract |
A super junction manufacturing method comprises the steps of providing a light-doping substrate to form a P-type heavily-doped region or a N-type heavily-doped region through the transmutation doping technology, and carrying out the annealing process on the P-type heavily-doped region or the N-type heavily-doped region; or providing a first type heavy-doping substrate to form a second type heavily-doped region through the transmutation doping technology, and carrying out the annealing process on the second type heavily-doped region. The super junction manufacturing method simplifies the manufacturing procedure, and lowers production cost. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109118947-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106531634-A |
| priorityDate |
2012-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |