http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103852702-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-161 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0649 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2013-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103852702-B |
| titleOfInvention | The method determining carrier concentration in semiconductor fin |
| abstract | A kind of method, including using four-point probe head to detect at least one semiconductor fin, four probe pins of four-point probe head contact with at least one semiconductor fin described.Calculate the resistance of at least one semiconductor fin.Carrier concentration by resistance calculations semiconductor fin.The method that present invention also offers the carrier concentration determined in semiconductor fin. |
| priorityDate | 2012-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.