http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103812001-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-187 |
| filingDate | 2014-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103812001-B |
| titleOfInvention | Method for preparing multi-wavelength silicon-based hybrid laser array by secondary exposure technology |
| abstract | The invention discloses a method for preparing a multi-wavelength silicon-based hybrid laser array by secondary exposure technology. The method includes the steps: 1) preparing needed optical gratings on silicon layers of SOI (silicon on insulator) wafers by the aid of the secondary exposure technology; 2) preparing a plurality of silicon waveguides with different widths in a direction perpendicular to the optical gratings on the silicon layers of the SOI wafers to obtain a silicon waveguide array; 3) depositing a metal layer outside a set area of each silicon waveguide and two sides of the silicon waveguide on the corresponding SOI wafer to serve as a bonding area; 4) preparing a multiple quantum well optical gain structure array; 5) taking a surface which is closest to each optical gain area in the multiple quantum well optical gain structure array as a bonding surface, and aligning and bonding the optical gain area in the multiple quantum well optical gain structure array and optical coupled areas corresponding to the silicon waveguides in the silicon waveguide array to obtain the multi-wavelength silicon-based hybrid laser array. The method has the advantages of simple and mature process, lost cost and high reliability. |
| priorityDate | 2014-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 14.