http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103806002-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_778fe5aa551806ca134b210927ef0eb8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-06 |
| filingDate | 2012-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf881e47e13cf74f13da8db7fa05d0a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3807f9b6f5229aac6c60c892b3bda391 |
| publicationDate | 2014-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103806002-A |
| titleOfInvention | Acid chemical mechanical polishing liquid |
| abstract | The invention provides an acid chemical mechanical polishing liquid including grinding particles, water, an oxidizing agent and a grinding accelerant, the grinding accelerant can be dissolved in the polishing solution and ionized to release metal ions. The polishing liquid can be used for polishing memory hard disks, can prevent the formation of micro convexes, micro pits and other surface defects in the polishing process of memory hard disk substrates, and meanwhile ensures a high polishing rate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108411305-A |
| priorityDate | 2012-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.