| abstract |
The present invention relates to performance function film and manufacture method thereof, such as, have the gas barrier film of higher capacity for air resistance, it uses cheap carrier and is with low cost and high production rate manufacture.According to functional membrane of the present invention, described functional membrane is that the glass transition temperature of organic layer is at least 100 DEG C, and its thickness is between 0.05 micron and 3 microns based on CVD method by making to be formed based on the organic layer of coating and inorganic layer lamination.Organic layer is coated with the coating of at least 5 cubic centimetres/square metres, and the viscosity after forming under rate of drying decrement states be more than 20 centipoises and surface tension be 34 milli Newton/meter below.Inorganic layer is that the gas phase film build method by producing for plasma is formed on the surface of organic layer. |