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publicationDate 2014-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-103794688-A
titleOfInvention Preparation method of a photonic crystal structure GaN-based LED
abstract A method for preparing a GaN-based LED with a photonic crystal structure relates to an LED device. 1) Evaporate a transparent conductive layer on the surface of the GaN-based LED epitaxial wafer; 2) Grow a mask layer on the transparent conductive layer grown in step 1); 3) Apply imprint on the mask layer grown in step 2) Glue, using a hard template for direct nanoimprinting, forming nanostructures on the surface of the colloid after demoulding; 4) Removing the residual glue on the epitaxial wafer; 5) Etching the epitaxial wafer to remove the mask layer that is not covered by the imprinting glue part, that is, to copy the nanostructure of the imprinting glue onto the mask layer; 6) remove all residual imprinting glue on the surface of the mask layer; 7) vapor-deposit the same transparent conductive layer as described in step 1) again on the surface of the epitaxial wafer; 8) Remove the residual mask layer on the surface of the epitaxial wafer, and obtain the photonic crystal structure on the transparent conductive layer; 9) Use the traditional process to obtain the photonic crystal structure GaN-based LED with the photonic crystal structure obtained in the above steps.
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