http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103763668-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-04 |
| filingDate | 2013-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103763668-B |
| titleOfInvention | A kind of MEMS microphone |
| abstract | The present invention is open proposes a kind of MEMS microphone, and it includes shell, pcb board and is positioned at enclosure and the asic chip being arranged on pcb board and MEMS vibrating diaphragm；Described shell is provided with multiple acoustic aperture and bottom surface opening, and this bottom surface opening is sealed by pcb board；Described MEMS vibrating diaphragm includes basement membrane, the upper electrode layer being attached to basement membrane one side surface and is attached to the lower electrode layer on basement membrane opposite side surface.The MEMS microphone of the present invention has the beneficial effect that highly sensitive, simple in construction, distortion are little. |
| priorityDate | 2013-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.